I. Product Overview
The ABN-SEM-3000 benchtop scanning electron microscope is a sophisticated opto-mechatronic instrument integrating high-precision angular scanning and highly stable optical control. It is primarily designed to achieve rapid, controllable deflection of laser beams or light beams along one-dimensional or two-dimensional axes. Featuring a compact benchtop layout, the equipment facilitates laboratory deployment and system integration, and is applicable to a wide range of scenarios including scientific research experiments, precision inspection, optical imaging, and micro-nano fabrication.
Technical Specifications
Accelerating voltage range: 1 kV – 20 kV, continuously adjustable
Resolution: Better than 15 nm (under typical operation mode)
Beam control: Equipped with an electronic lens system and automatic aperture adjustment to deliver high-contrast, large depth-of-field images
Column design: Multi-stage electromagnetic lens structure with built-in alignment coils and astigmatism correction system for clear image details
Image resolution: Multi-level adjustable from 1280×960 up to 4096×3072
Image acquisition functions: Real-time capture, video recording, measurement and analysis
Automatic functions: Auto-focus, automatic brightness and contrast adjustment
Measurement functions: Linear distance, angle, area, particle size analysis, etc.
System platform: Windows operating system, supporting LAN and cloud data sharing
II. Functional Features
High-precision angle control: Achieves fine scanning with micro-radian angular resolution.
Fast dynamic response: Meets high-speed scanning requirements, supporting continuous and step scanning modes.
Compact benchtop structure: Small footprint, convenient for desktop experimental system setup.
Multiple control interfaces: Compatible with analog voltage, digital signal and software control.
Excellent system compatibility: Capable of coordinating with lasers, detectors and microscopy systems.
III. Application Scenarios & Fields
Laser scanning imaging: Applied in confocal microscopy, spectral scanning and other systems.
Optical inspection and measurement: Suitable for light spot scanning, reflectivity and displacement measurement.
Micro-nano processing and exposure: Supports laser direct writing and precision exposure scanning.
Scientific research and teaching experiments: Used for optical principle teaching and experimental verification.
Automated optical systems: Integrated as a scanning module into automated equipment.
IV. Technical Advantages
High scanning precision: Adopts highly stable driving and high-precision feedback design.
Excellent repeatability: Highly consistent scanning trajectories, ideal for quantitative experiments.
Low-noise operation: Optimized mechanical structure and driving algorithm to minimize vibration and noise.
Strong system expandability: Single-axis or dual-axis scanning configurations can be expanded on demand.
Low maintenance cost: Mature mechanical structure with long service life.
V. Typical Models and Application Cases
Type | Structural Form | Scanning Method | Features | Applicable Scenarios |
Single-axis desktop scanning mirror | Single-axis swing | One-dimensional linear scanning | Simple structure, fast response speed, high stability |
· Wavelength scanning of spectroscopic system · Laser line scanning · Linear array detector matching scanning · One-dimensional displacement and reflection angle measurement
|
Dual-axis desktop scanning mirror | Dual-axis orthogonal scanning | Two-dimensional surface scanning | Supports arbitrary scanning trajectories and is suitable for imaging applications |
· Laser Scanning Microscopic Imaging
· Area Array Light Spot Scanning
· Laser Direct Writing and Exposure
· Two-Dimensional Optical Inspection System
|
High-Resolution Desktop Scanning Microscope | Single-axis or dual-axis optional |
· Step-and-Hold Microstepping Scan · Low-Frequency Continuous Scan · Fixed-Point Angle Hold Scan · High-Repeatability Angle Reciprocating Scan
| Angular resolution at microradian level with outstanding stability |
· High-precision Optical Measurement
· Interferometry Measurement System
· Precision Angle Control Experiment
· Metrology and Calibration System
|
High-speed Response Desktop Scanning Mirror | Single Axis / Dual Axis |
· Sinusoidal Scan · Sawtooth Scan · High-frequency Reciprocating Scan · Real-time Trajectory Scan
| High bandwidth and high scanning frequency |
· High-speed laser scanning imaging · Dynamic process observation · Real-time optical feedback system · Rapid scanning spectroscopy system
|
## VI. Technical Parameters
Accelerating voltage range: 1 kV – 20 kV, continuously adjustable;
Resolution: Better than 15 nm (in typical mode);
Beam current control: Equipped with an electronic lens system and automatic aperture adjustment to acquire high-contrast and high-depth-of-field images;
Column design: Multi-stage electromagnetic lens structure with built-in alignment coils and astigmatism correction system for clear image details;
Image resolution: Multiple adjustable levels ranging from 1280×960 to 4096×3072;
Image acquisition functions: Real-time capture, video recording, measurement and analysis;
Automatic functions: Auto-focus, automatic brightness and contrast adjustment;
Measurement functions: Line distance, angle, area, particle size analysis, etc.;
System platform: Windows operating system, supporting LAN/cloud data sharing
Schematic Diagram
Data chart
