The CH Comprehensive Analysis Probe Station Test System (ABN-MPS-001) is a high-precision manually controlled device specially designed for testing electronic materials, semiconductors and microelectronics. Equipped with an accurate manual operation system, it enables precise positioning and probing of samples, and is widely used in the testing of micro components, sample analysis and fault diagnosis. With precise X, Y and Z-axis control, the probe station supports high-accuracy sample manipulation and data acquisition, making it ideal for scientific research and industrial applications. Its robust structure guarantees stable operation during long-term service and delivers highly reliable and high-precision performance.
# Technical Parameters
## 1. Lifting Platform
Lifting range: 0–50 mm, electrically controlled, resolution: 0.02–4 mm/s
XY-axis adjustment range: 70 mm × 70 mm, maximum load: 50 kg, 360° rotatable
## 2. Optical System
Eyepiece magnification: 20X, working distance: 18.9 mm–33.61 mm
CCD camera: C-mount interface
Resolution: 640×480; Optical magnification: 5X/10X/20X/50X/100X. This is an optical flat-field microscope with a resolution of ≤1.2 μm and ultra-high imaging accuracy.
## 3. Three-axis Precision Frame
XY-axis travel: 120 mm
Z-axis travel: 65 mm
Sample platform dimensions: 600 mm × 600 mm × 200 mm
Maximum load: 10 kg
## 4. Working Environment
Material: Wooden frame
Surface treatment: Sprayed coating
Optical platform: Equipped with anti-vibration design, suitable for precision instrument operation
## 5. Electrical System
Voltage requirement: 220 V
Power: Maximum current 1 A, applicable voltage range: ±1500 V
High-stability mechanical structure: The overall structure features high rigidity to ensure stable probe contact during testing.
XYZ manual precision adjustment stage: Enables micron-level position adjustment for accurate alignment with the test area.
Multi-probe layout: Supports single-probe or multi-probe testing to meet diverse testing requirements.
Compatible with microscopic observation systems: Can be paired with a stereomicroscope or metallurgical microscope for real-time observation.
Adjustable probe holder angle: Facilitates probe contact with devices of various structures.
Easy operation and low maintenance cost: Suitable for long-term stable operation.
III. Application Scenarios & Fields
Basic electrical performance tests of semiconductor devices, including I-V characteristics, resistance, capacitance and other parameters.
Contact testing and verification of micro-nano devices and MEMS structures.
Electrical transport performance testing of two-dimensional material devices.
Experimental teaching and scientific research training platforms for universities.
Preliminary process verification and failure analysis of new devices.
IV. Technical Advantages
Mature and reliable structure with excellent testing stability. Designed with a high-rigidity mechanical structure, the manual probe station effectively resists external vibration and displacement during operation, maintaining stable contact between probes and samples to guarantee reliable electrical testing.
Precise manual adjustment and superior operational flexibility. Equipped with an XYZ three-axis fine-tuning mechanism, it allows intuitive control of probe movement, ideal for testing complex device structures and non-standard samples.
High coordination between microscopic observation and probe operation. Compatible with various microscopic systems, the device enables simultaneous probe positioning and sample observation, boosting testing efficiency and operational accuracy.
Strong compatibility and wide application range. It supports multiple probe types and test configurations, covering basic testing requirements for semiconductors, micro-nano devices, two-dimensional materials and other fields.
Cost-effective for long-term deployment in research and teaching settings. Compared with fully automatic and semi-automatic test systems, this manual probe station delivers sound basic testing performance with lower procurement and maintenance costs, making it well-suited for long-term use in scientific research and teaching environments.
